Modified metal mold for use in imprinting processes
AssigneeObducat AB
InventorsMatthias Keil, Goran Frennesson, Marc Beck, Babak Heidari
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AssigneeObducat AB
InventorsMatthias Keil, Goran Frennesson, Marc Beck, Babak Heidari
Estimating the term…
The invention relates to a novel metal mold having anti-adhesive properties comprising a base metal mold and an anti-adhesive layer comprising a fluorinated alkyl phosphoric acid derivative or a fluorinated alkyl poly-phosphoric acid derivative, including a phosphorous atom and an alkyl chain. The anti-adhesive layer is bonded directly onto a surface of the base metal mold. The base metal mold may be e.g. Nickel, and said fluorinated alkyl phosphoric acid derivative or said fluorinated alkyl poly-phosphoric acid derivative may be selected from the group consisting of phosphonic acids, phosphonic acids, phosphonates and phosphonate salts, phosphonates and phosphonate salts, or their respective oligomers, such that the phosphorous atom is coupled directly to the alkyl chain, such that the phosphorous atom is coupled directly to the alkyl chain.
A modified metal mold having anti-adhesive properties comprising a base metal mold and an anti-adhesive layer comprising a fluorinated alkyl phosphoric acid derivative or a fluorinated alkyl poly-phosphoric acid derivative, including a phosphorous atom and an alkyl chain characterised in that said anti-adhesive layer is bonded directly onto a surface of the base metal mold.
The mold according to any of the preceding claims, wherein the base mold metal is Nickel, Vanadium, Aluminium, Tantalum, Niobium, Zirconium, or Titanium.
The mold according to any of the preceding claims, wherein the base mold metal is Nickel.
The mold according to any of the preceding claims, wherein the base mold metal is oxidised.
A mold according to any one of the preceding claims, wherein said anti-adhesive layer is obtainable by a deposition method comprising deposition of a selected fluorinated alkyl phosphoric acid derivative or a selected fluorinated alkyl poly-phosphoric acid derivative from (a) solution, and/or (b) from the vapour phase, and/or (c) from a supercritical fluid phase, onto the mold metal.
A process for manufacturing a mold with an anti-sticking layer on a surface of the mold, comprising the steps of:
A process for manufacturing a mold with an anti-sticking layer on a surface of the mold, comprising the steps of:
Dependencies are inferred from the claim text.