Vaporizer for cvd, solution-vaporization type cvd apparatus and vaporization method for cvd

A vaporizer for CVD comprising:

• a plurality of raw-material-solution pipes which respectively supply a plurality of raw-material solutions separately from one another;
• a carrier gas pipe which is disposed in such a manner as to surround exteriors of said plurality of raw-material-solution pipes and allows a pressurized carrier gas to flow to said exterior of each of said plurality of raw-material-solution pipes;
• an orifice provided in a leading end of said carrier gas pipe and spaced away from leading ends of said plurality of raw-material-solution pipes;
• a vaporization tube connected to said leading end of said carrier gas pipe and led to an interior of said carrier gas pipe via said orifice;
• and heating means for heating said vaporization tube.

A vaporization method for CVD comprising:

• supplying a plurality of raw-material solutions and a carrier gas to a dispersion unit separately from one another;
• mixing said plurality of raw-material solutions and the carrier gas in said dispersion unit and dispersing said plurality of raw-material solutions into said carrier gas in a fine particulate or misty form;
• and
• vaporizing said raw-material solutions by adiabatic expansion immediately after dispersion.