US 2007/0166135 A1 · Transport robot and transport apparatus

Abstract

A transport robot including a release-side high radiation ratio portion and a receive-side high radiation ratio portion that face each other. Heat in a substrate conducted to a base portion due to thermal conduction is released as radiant heat from the release-side high radiation ratio portion, and the radiant heat is absorbed by the receive-side high radiation ratio portion. The receive-side high radiation ratio portion is formed on a heat-receiving plate that is thermally connected to a vacuum chamber so that radiant heat absorbed by the receive-side high radiation ratio portion is transferred to the vacuum chamber. As a result, even in the case where the high-temperature substrate is transported in a vacuum atmosphere, heat from the substrate is not accumulated in a transport system, and the transport system hardly reaches a high temperature.

Claims20

Dependent claims

A transport robot, comprising:

a base portion;
and
an arm supported by the base portion via a support shaft, and
the transport robot transporting a substrate by moving the arm,
wherein the base portion includes a first surface that can face the substrate, and a second surface on the opposite side to the first surface,
wherein a release-side high radiation ratio portion having a radiation ratio that is made higher by surface treatment than a radiation ratio in a state prior to the surface treatment is formed on the second surface, and
wherein a heat-receiving plate for receiving heat emitted from the release-side high radiation ratio portion is provided, the heat-receiving plate being disposed such that a surface of the heat-receiving plate faces the release-side high radiation ratio portion.

4 more elements

A transport apparatus comprising a vacuum chamber and a transport robot, the transport robot comprising:

a heat-receiving plate attached to one wall surface of the vacuum chamber;
a base portion disposed facing and spaced away from the heat-receiving plate;
and
an arm supported by the base portion via a support shaft, and
the transport robot transporting a substrate by moving the arm,
wherein the base portion includes a first surface that can face the substrate, and a second surface on the opposite side to the first surface that faces the heat-receiving plate,
wherein a release-side high radiation ratio portion having a radiation ratio that is made higher by surface treatment than a radiation ratio in a state prior to the surface treatment is formed on the second surface of the base portion, and
wherein a heat-receiving plate for receiving heat emitted from the release-side high radiation ratio portion is provided, the heat-receiving plate being disposed such that a surface of the heat-receiving plate faces the release-side high radiation ratio portion.

5 more elements

Dependencies are inferred from the claim text.

Transport robot and transport apparatus

Life of this patent

Transport robot and transport apparatus

Life of this patent

Abstract

Claims20