Optical input substrate, optical output substrate, optical input/output substrate, a fabrication method for these substrates, and an optical element integrated semiconductor integrated circuit
OwnerMikio Oda, Hisaya Takahashi +3inventors
InventorsMikio Oda, Hisaya Takahashi, Kaichiro Nakano, Hikaru Kouta, Kohroh Kobayashi
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