Soft x-ray processing device and soft x-ray processing method
OwnerTetsuya Makimura, Kouichi Murakamiinventors
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Abstract
Use an ellipsoidal mirror that matches the wavelength of soft X-ray and thereby improves light-focusing efficiency, to increase the energy density of soft X-ray and process and/or refine works made of inorganic materials, etc., at an accuracy of several nm by using only soft X-ray, without irradiation with both patterned soft X-ray (patterned beam) and processing laser light. Focus soft X-ray 14 emitted from a light source part 7 to high energy density using an ellipsoidal mirror 15 and irradiate a work 19 with the focused light in a specified pattern in order to process only the area of the work 19 that has been irradiated with soft X-ray 14 in the specified pattern.
Claims11
An optical processing apparatus comprising a light source part and a light-focusing irradiation means, the optical processing apparatus characterized in that:
- the light source part generates ultraviolet light and/or soft X-ray that allows a work to effectively absorb light, by irradiation of a target with laser light focused using a light-focusing optics system;
- and
- the light-focusing irradiation means comprises an optics system to focus the ultraviolet light and/or soft X-ray to high energy density in accordance with the wavelength of ultraviolet light and/or soft X-ray, irradiates the work with said focused ultraviolet light and/or soft X-ray of high energy density in a specified pattern, and processes and/or refines the work.
An optical processing apparatus comprising a light source part and a patterning and irradiating means, the optical processing apparatus characterized in that:
- the light source part generates ultraviolet light and/or soft X-ray that allows a work to effectively absorb light, by irradiation of a target with laser light focused using a light-focusing optics system;
- and
- the patterning and irradiating means comprises an optics system to focus the ultraviolet light and/or soft X-ray to high energy density in accordance with the wavelength of ultraviolet light and/or soft X-ray, irradiates the work with said focused ultraviolet light and/or soft X-ray of high energy density as a specified patterned beam adjusted to a desired shape, and processes and/or refines the work.
An optical processing method characterized by comprising:
- focusing and irradiating a laser beam at a light source part onto a target through a light-focusing optics system, and generating ultraviolet light and/or soft X-ray that allows a work to effectively absorb light;
- and
- focusing the ultraviolet light and/or soft X-ray to high energy density in accordance with the wavelength of said ultraviolet light and/or soft X-ray using an ellipsoidal mirror, irradiating the work with the focused ultraviolet light and/or soft X-ray at high energy density in a specified pattern, and processing and/or refining the work.
Dependencies are inferred from the claim text.