Multiple wavelength X-ray source
AssigneeBruker AXS GmbH
InventorsRoger Durst, Bob He, Carsten Michaelsen, Chuji Katayama
Life of this patent
Estimating the term…
Abstract
A multiple wavelength X-ray source includes an electron-generating cathode and an anode with multiple target regions, each of which emits X-rays at a different characteristic wavelength in response to the electrons. The different X-ray radiation outputs are focused by different focusing sections of a focusing optic. The multiple focusing sections are in different respective locations, and each focuses its respective X-ray radiation onto a sample. The focusing sections may be side-by-side mirrors in a Kirkpatrick-Baez configuration, or in a single-bounce, doubly curved elliptical configuration.
Claims25
A multiple wavelength X-ray source for directing X-ray energy to a sample, the source comprising:
- a cathode that emits electrons;
- an anode upon which the electrons are incident, the anode comprising a plurality of sections, each section consisting of a target material which generates X-ray radiation at a characteristic wavelength in response to the incident electrons, the sections consisting of different target materials that generate X-ray radiation at different characteristic wavelengths and each of the plurality of anode sections being located at a different position relative to the sample;
- and
- a focusing optic having a plurality of focusing sections each with a different relative fixed location, each focusing section focusing the X-ray radiation corresponding to a different one of the characteristic wavelengths onto the sample.
A dual wavelength X-ray source for directing X-ray energy to a sample, the source comprising:
- a cathode that emits electrons along one of a first trajectory and a second trajectory in response to a user input;
- an anode upon which the electrons are incident, the anode comprising a first target material that generates X-ray radiation at a first characteristic wavelength in response to electrons following the first trajectory and a second target material different from the first target material that generates X-ray radiation at a second characteristic wavelength in response to electrons following the second trajectory;
- and
- a focusing optic having a first focusing section in a first location, and a second focusing section in a second location different from the first location, the first focusing section focusing the X-ray radiation corresponding to the first characteristic wavelength onto the sample and the second focusing section focusing the X-ray radiation corresponding to the second characteristic wavelength onto the sample, the first and second focusing sections being fixed in location relative to each other.
A method of directing X-ray energy to a sample, the method comprising:
- generating electrons with a cathode;
- receiving the electrons with an anode comprising a plurality of sections, each section consisting of a target material which generates X-ray radiation at a characteristic wavelength in response to the incident electrons, the sections consisting of different target materials that generate X-ray radiation at different characteristic wavelengths and each of the plurality of the anode sections being at a different position relative to the sample;
- and
- focusing the X-ray radiation with a focusing optic having a plurality of focusing sections each with a different relative fixed location, each focusing section focusing the X-ray radiation corresponding to a different one of the characteristic wavelengths onto the sample.
Dependencies are inferred from the claim text.