Light delivery module, method of fabricating the same and heat-assisted magnetic recording head using the light delivery module

An heat-assisted magnetic recording (HAMR) head disposed on one end of a slider with an air bearing surface, the HAMR head comprising:

• a magnetic path forming unit which forms a magnetic field for recording;
• a light source which emits light;
• and
• a light delivery module which delivers the light from the light source, the light delivery module comprising:
• an optical waveguide having one end formed as a inclined plane which is inclined at an angle Φ with respect to an incident light axis to deliver the light from the light source;
• and
• a nano aperture which changes an energy distribution of the light delivered through the inclined plane to generate an enhanced near-field,
• wherein the angle Φ=90°−θiB, where θiB represents a Brewster's angle at which only a vertically polarized light of the incident light is reflected.

A method of fabricating a light delivery module which comprises an optical waveguide delivering light from a light source, and a nano aperture having a slit serving as a near-field optical unit enhancing the light delivered from the optical waveguide, the method comprising:

• performing electron beam lithography to form a mold with an engraved space corresponding to the optical waveguide and the slit on a first substrate;
• coating at least one layer forming the optical waveguide and the slit on a second substrate and pre-baking the second substrate with the coated layer;
• stamping the mold on the second substrate and post-baking the second substrate which has been stamped with the mold;
• and
• depositing a metal film surrounding the slit on the second substrate.