Optical retarders and methods of making the same
OwnerJian Wang, Xuegong Denginventors
Life of this patent
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Abstract
In one aspect, the disclosure features an article that includes a first layer having spaced-apart rows of a first material, and a second layer supported by the first layer, the second layer having spaced-apart rows of a second material. The rows of the first layer extend along a first direction and the rows of the second layer extend along a second direction non-parallel with the first direction and each layer is independently birefringent for light of a wavelength λ propagating along an axis that intersects the first and second layers, where λ is in a range from about 150 nm to about 5,000 nm.
Claims51
An article, comprising:
- a first layer comprising spaced-apart rows of a first material, and
- a second layer supported by the first layer, the second layer comprising spaced-apart rows of a second material,
- wherein the rows of the first layer extend along a first direction and the rows of the second layer extend along a second direction non-parallel with the first direction and each layer is independently birefringent for light of a wavelength λ propagating along an axis that intersects the first and second layers, where λ is in a range from about 150 nm to about 5,000 nm.
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An article, comprising:
- a first layer comprising spaced-apart rows of a first material, centers of adjacent rows of the first material being spaced apart by about 400 nm or less, and
- a second layer supported by the first layer, the second layer comprising spaced-apart rows of a second material, centers of adjacent rows of the second material being spaced apart by about 400 nm or less;
- wherein the rows of the first layer extend along a first direction and the rows of the second layer extend along a second direction non-parallel with the first direction.
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A method, comprising:
- forming a first layer comprising spaced-apart rows of a first material using atomic layer deposition, the rows of the first material extending along a first direction, and
- disposing a second layer over first layer, the second layer comprising spaced-apart rows of a second material extending along a second direction non-parallel with the first direction.
97-104. (canceled)
Dependencies are inferred from the claim text.