Microscopic electro-mechanical systems, radio frequency devices utilizing nanocoils and spiral pitch control techniques for fabricating the same

A large-scale deflecting microscopic electromechanical systems (MEMS) actuator, comprising:

• a substrate including a voltage supply on a top surface of the substrate;
• a nanocoil, situated on the top surface of the substrate, in which the voltage supply provides voltage to the nanocoil and in which the nanocoil coils in a fully coiled off position when the voltage supply is off and the nanocoil uncoils towards a substantial flat, uncoiled on position, covering a substantial portion of the top surface of the substrate when the voltage supply is on.

A tunable, variable antenna comprising:

• an array of one or more nanocoil arms configured as antennas for receiving signals, the one or more nanocoil arms comprising a nanocoil that may be uncoiled at varying lengths depending on an amount of supplied voltage, in which the length of one or more nanocoil arms determines wavelength of signals receivable by antenna;
• and
• a voltage supply for supplying supplied voltage to one or more nanocoil arms to vary the length of one or more nanocoil arms and wavelength of signals receivable by antenna.

An inductor comprising:

• a spiral nanocoil tube with a plurality of spiral coils adjacent to each other, in which the spiral coils have a substantially constant pitch, the spiral nanocoil tube defines a air core, and the spiral nanocoil tube is fabricated from material providing inductance when a current is applied to the spiral nanocoil tube.