Dual technology optical profilometer
AssigneeUniversitat Politecnica De Catalunya
InventorsFerran Laguart Bertran, Roger Artigas Pursals, Cristina Cadevall Artigues
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Abstract
The device comprises a light source (LED), beam splitters, illumination pattern generating mechanism and interchangeable microscope lenses that are lenses that may be used to obtain confocal images and lenses that may be used to obtain interferometric images. The generating mechanism can generate a sequence of illumination patterns to obtain confocal images, or total opening of all the illumination pixels to obtain interferometric images.
Claims10
1- A dual technology optical profilometer comprising a light source, beam splitters and a series of microscope lenses further comprising,
- illumination pattern generating means, said microscope lenses being interchangeable, said microscope lenses including first lenses to obtain confocal images of the surface of a sample and second lenses to obtain interferometric images of the surface of the sample.
2- A dual technology optical profilometer as claimed in claim 1, wherein said illumination pattern generating means comprise an LCOS micro-display.
3- A dual technology optical profilometer as claimed in claim 1, wherein said light source is a light-emitting diode.
4- A dual technology optical profilometer as claimed in claim 1 wherein the beam splitter is a polarizing beam splitter associated with said micro-display.
5- A dual technology optical profilometer as claimed in claim 2, wherein, said micro-display is adapted to generate a sequence of illumination patterns, making it possible to obtain confocal images or to have all the illumination pixels open, making it possible to obtain interferometric images.
6- A dual technology optical profilometer as claimed in claim 3, wherein, said light-emitting diode emits a spectrum of light with a coherence length ranging from 2 to 10 μm, making it possible to apply both the phase shift interferometric profilometry (PSI) technique and the vertical scanning with white light profilometry (VSI) technique.
7- A dual technology optical profilometer as claimed in claim 1, further comprising, a vertical scanning system of the sample, making it possible to obtain a series of confocal or interferometric images in different planes of the sample located at different heights from which, by using the appropriate algorithms, the surface topography of said sample is obtained.
8- A dual technology optical profilometer as claimed in claim 7, wherein, said vertical scanning system of the sample includes a motor-driven means.
9- A dual technology optical profilometer as claimed in claim 7, wherein said vertical scanning system of the sample includes a piezoelectric-driven means (PZT).
10- A dual technology optical profilometer as claimed in claim 8 wherein said scanning system is controlled by means of an open loop or closed loop system.