Fourier spectrometer with a modular mirror, integrated on

A Fourier spectrometer for determining spectral information of an incident optical input signal, the spectrometer comprising:

• a support layer that is transparent to the optical input signal;
• a sensor for the generation of an electrical output signal, that is provided on the support layer, and that is at least partially transparent to the optical input signal;
• a reflective layer provided on a side of the sensor that is opposite to the support layer for reflecting the incident optical input signal and for generating an optically standing wave from the incident input signal and the reflected input signal for reflecting the incident optical input signal and for the generation of an optical standing wave of the incident input signal and the reflected input signal;
• and
• an empty chamber between the sensor and the reflective layer for allowing adjustment of a spacing between the sensor and the reflective layer, the sensor being designed for scanning the intensity of the standing wave and for generating an output signal containing the spectral information of the input signal;
• and
• layer electrodes for contacting the sensor and/or for applying an electric voltage for the electrostatic adjustment of a spacing between the sensor and the reflective layer
• wherein the layer electrodes consist of transparent, conductive oxides, particularly Sn02, ZnO, In203 or Cd2Sn04 doped with B, Al, In, Sn, Sb or F:
• of thin metal films, particularly of Al, Ag, Cr. Pd or of semiconductive layers particularly of amorphous, microcrystalline, polycrystalline or crystalline semiconductor layers of silicon, germanium, carbon, nitrogen, oxygen or alloys of these materials;
• wherein the support layer, the sensor and the reflective layer together are integrated in a semiconductor component and are substantially oriented parallel each other and perpendicular to an incident optical input signal for the generation of the optically standing wave.