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AssigneeLaVision GmbH
InventorThomas Berg
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The subject matter of the invention is a method of determining, by means of absorption spectroscopy, the pressure of a gas or gas mixture in a vacuum container located in an environment that also contains the gas to be measured, but at a pressure different from that in the vacuum container, comprising a laser and a laser detector, the absorption curve AR(λ) of the gas to be determined being determined in the beam path between laser and detector in a first step, the vacuum container being placed into the beam path and the absorption curve AM(λ) of the gas to be determined being determined in the beam path into which the vacuum container has been placed in a second step, that the absorption curve AR(λ) is made to coincide by compression with the absorption curve AM(λ) outside of the absorption curve of the gas to be measured, the extent of compression being determined by a proportionality factor c, the following relation applying for determining the gas to be measured in the vacuum container: AG(λ)=AM(λ)−c·AR(λ).
A method of determining, by means of absorption spectroscopy, the pressure of a gas or gas mixture in a vacuum container located in an environment that also contains the gas to be measured, but at a pressure different from that in the vacuum container, comprising a laser and a laser detector, the absorption curve AR(λ) of the gas to be determined being determined in the beam path between laser and detector in a first step, the vacuum container being placed into the beam path and the absorption curve AM(λ) of the gas to be determined being determined in the beam path into which the vacuum container has been placed in a second step, that the absorption curve AR(λ) is made to coincide by compression with the absorption curve AM(λ) outside of the absorption curve of the gas to be measured, the extent of compression being determined by a proportionality factor c, the following relation applying for determining the gas to be measured in the vacuum container:
Dependencies are inferred from the claim text.