Method for optically detecting leaks in gas-tight housing especially of micro-electro-mechanical systems (mems)
OwnerMarcus Grigatinventor
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Abstract
The invention relates to a method for optically detecting leaks in gas-tight housings of especially micro-electro-mechanical systems (MEMS), wherein the objects to be tested are disposed in a pressure chamber covered by a glass plate and are impinged upon by pressure, and the resulting deformation of the object surface (membrane) and the subsequent receding change of the deformation is optically measured. The inventive method is characterized in that optical detection is carried out by means of a contactless profilometer (1) using a chromatic confocal sensor, whereby the glass plate (3) serving as the cover of the pressure chamber (8) is part of the optical system of the sensor.
Claims8
Method for optical detection of leaks in gas-tight housings, particularly of micro-electronic systems (MEMS), in which the deformation of the object surface (membrane) resulting from pressure impact on the objects disposed in a pressure chamber covered with a glass plate, and the subsequent reverse status change of this deformation are optically measured,
- wherein
- the optical detection takes place by means of a profilometer (1) that works without contact, using a chromatic confocal sensor, whereby the glass plate (3) that serves as a cover for the pressure chamber (8) is part of the optical system of the sensor.
Dependencies are inferred from the claim text.