System for monitoring foreign particles, process processing apparatus and method of electronic commerce
AssigneeHitachi Electronics Engineering Co., Ltd.
InventorsHidetoshi Nishiyama, Minori Noguchi, Tetsuya Watanabe, Takuaki Sekiguchi
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Abstract
A system for monitoring foreign matter includes a manufacturing line having plural process processing apparatuses, a production management system which manages the processing of workpieces in the manufacturing line, plural optical heads which monitor foreign matter in relation to at least one of the workpieces, and which provide an output signal indicative thereof, and at least one image signal processing unit provided in a lesser number than a number of the plural optical heads for processing the output signal therefrom.
Claims3
A system for monitoring foreign matter comprising:
- a manufacturing line having plural process processing apparatuses;
- a production management system which manages the processing of workpieces in the manufacturing line;
- plural optical heads which monitor foreign matter in relation to at least one of the workpieces, and which provide an output signal indicative thereof;
- and
- at least one image signal processing unit provided in a lesser number than a number of the plural optical heads for processing the output signal therefrom.
Dependencies are inferred from the claim text.