Projection objective for a microlithographic projection exposure apparatus
AssigneeCarl Zeiss SMT GmbH
InventorsBernhard Kneer, Norbert Wabra, Toralf Gruner, Alexander Epple, Susanne Beder, Wolfgang Singer
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AssigneeCarl Zeiss SMT GmbH
InventorsBernhard Kneer, Norbert Wabra, Toralf Gruner, Alexander Epple, Susanne Beder, Wolfgang Singer
Estimating the term…
A projection objective of a microlithographic projection exposure apparatus (110) is designed for immersion operation in which an immersion liquid (134) adjoins a photosensitive layer (126). The refractive index of the immersion liquid is greater than the refractive index of a medium (L5; 142; L205; LL7; LL8; LL9). that adjoins the immersion liquid on the object side of the projection objective (120; 120′; 120″). The projection objective is designed such that the immersion liquid (134) is convexly curved towards the object plane (122) during immersion operation.
A projection objective of a microlithographic projection exposure apparatus for imaging a mask that is disposable in an objective plane of the projection objective on a photosensitive layer that is disposable in an image plane of the projection objective, wherein
A projection objective of a microlithographic projection exposure apparatus for imaging a mask on a photosensitive layer that is disposable in an image plane of the projection objective, wherein the projection objective is designed for immersion operation in which an immersion liquid adjoins the photosensitive layer, and wherein
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