Liquid delivering apparatus and method of producing the same

A method of producing at least one liquid delivering apparatus each including at least one piezoelectric element which deforms upon application of a drive voltage thereto and at least one liquid chamber which stores liquid and which is formed so as to be opposed to said at least one piezoelectric element, the liquid in the liquid chamber being given pressure by deformation of said at least one piezoelectric element, so that the liquid is delivered to an exterior of said at least one liquid delivering apparatus, the method comprising the steps of:

• a laminated-member forming step of forming a laminated member including a first layer and a second layer that are bonded integrally to each other, the second layer having resistance to conditions under which the first layer is etched;
• a liquid-chamber forming step of forming said at least one liquid chamber such that the laminated member formed in the laminated-member forming step is etched under the conditions that only the first layer is substantially etched, so that at least one portion of the first layer which correspond to said at least one liquid chamber is removed to such an extent that at least one portion of the second layer corresponding to said at least one portion of the first layer is exposed, for thereby forming said at least one liquid chamber, the second layer constituting an oscillating plate and said at least one portion of the second layer from which said at least one portion of the first layer has been removed functioning as an oscillating portion of the oscillating plate which is oscillated by deformation of said at least one piezoelectric element;
• and
• a piezoelectric-layer forming step of forming at least one piezoelectric layer as said at least one piezoelectric element on one of opposite surfaces of the second layer of the laminated member that is remote from the first layer, the piezoelectric-layer forming step being carried out prior to the liquid-chamber forming step.