Surface electron emission device array and thin film transistor inspection system using the same

A method of inspecting a TFT array using a TFT inspection system, the TFT inspection system including a surface electron emission device array having a first electrode disposed to face the TFT array in a first direction, a second electrode disposed in a second direction intersecting the first direction in a region corresponding to a region in which the first electrode and a corresponding pixel electrode of the TFT array are formed, and an insulating layer interposed between the first electrode and the second electrode, the TFT inspection method comprising:

• applying a voltage to the first electrode and the second electrode of the surface electron emission device array corresponding to a pixel electrode electrically connected to a TFT to be inspected, thereby emitting electrons from a surface of the second electrode;
• turning on the TFT to be inspected by applying a voltage higher than a threshold voltage of the TFT to a gate line of the TFT array connected to the TFT to be inspected;
• measuring a current flowing through a source line of the TFT array connected to the TFT to be inspected;
• and
• determining whether the TFT is operating normally.

A surface electron emission device array comprising:

• a first electrode disposed in a first direction;
• a second electrode disposed in a second direction intersecting the first direction in a region corresponding to a region in which the first electrode is located;
• and
• an insulating layer interposed between the first electrode and the second electrode.