Micro-array inertia sensing system based single chip device

A single chip device, comprising:

• a plurality of sense units arranged in a matrix form and each comprising:
• a metal layer;
• a metal post running vertically through a center point of the sense unit and connected with the metal layer, wherein the metal layer is swingable in plural degrees of freedom;
• an electrode structure disposed below and in parallel with the metal layer, comprising:
• a plurality of activation electrodes disposed circumferentially and symmetrically with respect to the center point and each forming a capacitance with the metal layer;
• a plurality of sense electrodes disposed circumferentially and symmetrically with respect to the center point and the plurality of activation electrodes and sensing a plurality of capacitances formed between each of the plurality of activation electrodes and the metal layer, respectively, to obtain a capacitance signal for each of the plurality of capacitances;
• and
• a stop member disposed circumferentially with respect to the plurality of sense electrodes so as to limit the metal layer to swing over a specific range;
• and
• a circuit receiving the capacitance signal for each of the plurality of capacitances to determine an inertia of an object on which the single chip device is applied for each of the plurality of sense units.