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AssigneeInternational Business Machines Corporation
InventorsFadi Gebara, Ying Liu, Jayakumaran Sivagnaname, Ivan Vo
Estimating the term…
An active cancellation matrix for process parameter measurements provides feedback paths for each test location wherein each feedback path is used to sense the applied voltage and the sensed voltage is used to adjust the source voltage for any variations along the input path. The devices under test are arranged in a row and column array, and the feedback and voltage input paths are formed along respective rails which extend generally parallel to a row of devices under test. Selectors are used to selectively route the outputs of the test nodes to a measurement unit such as a current sensor. The input voltages can be varied to establish current-voltage (I-V) curves for the devices under various conditions. In the example where the devices under test are transistors, each source input includes three voltage inputs (rails) for a drain voltage, a source voltage, and a gate voltage.
A method of applying a known voltage at a test location in an array of devices under test arranged in rows and columns, comprising:
An active cancellation matrix for an array of devices under test, comprising:
A system for testing electronic devices arranged in a row and column array, comprising:
Dependencies are inferred from the claim text.