Method for detecting abnormality of probe card
AssigneeSamsung Electronics Co., Ltd.
InventorJung-Kwan Park
Life of this patent
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Abstract
There is provided a system and method for detecting abnormalities in a probe card. A reference image value of a normal contacting pad is set, an image value of a pad is extracted when an error occurs, and the extracted image value is compared to the reference image value. An alarm can be issued when the extracted image value is greater than the reference image value, and the probe card is inspected. The contacting state of the scanning probes and the pads can be automatically checked for abnormalities of the probe card during electrical testing, to accurately determine the contacting status of the scanning probes and the pads, and to not rely on an operator's subjectivity and level of expertise.
Claims20
A method for detecting abnormalities in a probe card, the method includes performing a probe test comprising:
- setting a reference image value of a normal contacting pad;
- extracting an image value of a pad when an error occurs;
- comparing the extracted image value to the reference image value;
- issuing an alarm when an abnormality is detected on the extracted image;
- and
- inspecting the probe card.
A method for performing a probe test, comprising:
- setting a reference image value of a normal contacting pad;
- extracting an image value of a pad when an error occurs;
- and
- comparing the extracted image value to the reference image value.
An apparatus for detecting abnormalities in a probe card, the apparatus comprising:
- a storage device configured for storing a reference image value of a normal contacting pad;
- an image extractor configured to extract an image value of a pad when an error occurs;
- and
- an image value comparator configured to compare the extracted image value to the reference image value.
Dependencies are inferred from the claim text.