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US 2007/0164747 A1Published application
Method and apparatus for simulating electrostatic discharge events in manufacturing and calibrating monitoring equipment
AssigneeIntel Corporation
InventorTimothy Maloney
Life of this patent
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Abstract
In some embodiments, a method and apparatus for simulating electrostatic discharge events in manufacturing and calibrating monitoring equipment are presented. In this regard, a device is introduced to simulate an ESD event by discharging a stored charge and measuring in situ the quantity of charge discharged. Other embodiments are also disclosed and claimed.
Claims15
A method comprising:
- discharging a stored charge to a ground plate that is in range of an EMI antenna;
- and
- measuring in situ the quantity of charge discharged.
An apparatus, comprising:
- a voltage source;
- a charge storage electrically coupled to the voltage source;
- a peg to discharge a stored charge;
- and
- circuitry to measure in situ the quantity of charge discharged.
2 more elements
A system comprising:
- a platform containing a ground plate;
- an antenna to measure electrostatic events at the platform;
- and
- an instrument charged to a known voltage to discharge a charge to the ground plate which is measurable in situ.
1 more element
Dependencies are inferred from the claim text.