Field emission display device and cathode plate thereof and method for fabricating the same

A method for fabricating a cathode plate of a field emission display, comprising:

• providing a substrate;
• forming a patterned mask layer on a surface of the substrate;
• forming a patterned electrode layer on the mask layer and a portion of the substrate around the mask layer;
• forming a plurality of emitters on the patterned electrode layer;
• forming a dielectric layer over the substrate;
• forming a patterned gate layer on the dielectric layer with;
• carrying out a backside exposure process using the patterned mask layer as a mask, wherein portions of the dielectric layer exposed to a light used in the backside exposure process react with the light;
• and
• removing portions of the dielectric layer not exposed to the light and portions of the patterned gate layer to form a plurality of gate holes and a plurality of via holes exposing the emitters.

A cathode plate of a field emission display, comprising:

• a substrate;
• a patterned mask layer or absorption layer, disposed on a surface of the substrate;
• a patterned electrode layer, covering the mask layer and a portion of the substrate around the mask layer,
• a plurality of emitters, respectively disposed on the patterned electrode layer;
• a dielectric layer, covering the patterned electrode layer and the substrate, wherein the dielectric layer has via holes corresponding to the patterned mask layer and exposing the emitters;
• and
• a patterned gate layer, disposed on the dielectric layer, wherein the patterned gate layer has gate holes corresponding to the via holes and exposing the emitters.