Pattern transfer device and pattern transfer method
AssigneePioneer Corporation
InventorOsamu Kasono
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Abstract
An object is to transfer a concavo-convex pattern formed on the surface of a transfer die onto a transfer target accurately. A pattern transfer apparatus according to the present invention is one for putting a transfer die having a concavo-convex pattern against a transfer target on a substrate to transfer the concavo-convex pattern onto a surface of the transfer target. It is characterized by comprising pressing means for pressing the transfer die against the transfer target on the substrate at a plurality of different locations independently.
Claims22
A pattern transfer apparatus for putting a transfer die having a concavo-convex pattern against a transfer target on a substrate to transfer the concavo-convex pattern onto a surface of said transfer target, wherein at least part of said transfer die is made of a ferromagnetic material;
- said pressing means includes magnetic force generating means for generating a magnetic force;
- said magnetic force generating means are provided to near said substrate and comprises at least two or more electromagnets;
- and said magnetic force generating means applies a magnetic force to said transfer die with said substrate interposed therebetween, thereby pressing said transfer die against said substrate.
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A pattern transfer method for putting a transfer die having a concavo-convex pattern against a transfer target on a substrate to transfer said concavo-convex pattern onto a surface of said transfer target,
- the method comprising:
- a uniform pressure pressing step of pressing said transfer die against said transfer target on said substrate with uniform pressure;
- and
- a nonuniform pressure pressing step of pressing said transfer die against said transfer target on said substrate at a plurality of different locations independently so that it is compensated to incline and distort said transfer die.
Dependencies are inferred from the claim text.