Pattern forming method and its mold
AssigneeHitachi, Ltd.
InventorsMasahiko Ogino, Akihiro Miyauchi, Takashi Ando, Chiseki Haginoya, Susumu Komoriya, Yasunari Sohda, Souichi Katagiri, Hiroya Ohta, Yoshinori Nakayama
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Abstract
In a mold in which a pattern is formed of a fine concavo-convex shape, two or more of alignment marks for determining a relative positional relation between a substrate and a mold are formed concentrically. Moreover, a damaged mark is identified from the positional information and shape of the respective marks, and an alignment between the mold and the substrate to which a resin film is applied is carried out excluding the damaged mark.
Claims19
A pattern forming method of pressing a mold, in which a concavo-convex pattern is formed, against a substrate to which a resin film is applied, and thereby transferring this concavo-convex pattern to a surface of the substrate, wherein the mold has two or more alignment marks for determining a relative positional relation between the substrate and the mold, on a concentric circle, wherein alignment between the mold and the substrate is carried out from the relative positional relation between the alignment mark and an edge of a circular opening of the substrate.
A pattern forming method of pressing a mold, in which a fine concavo-convex pattern is formed, against a substrate and thereby transferring the fine concavo-convex pattern to the surface of the substrate, wherein the mold has a plurality of alignment marks for determining a relative positional relation between the substrate and the mold, the method further comprising detecting whether or not the alignment mark has a damage at the time of determining the relative position, wherein if a damaged alignment mark is detected in the detecting, alignment is carried out using alignment marks except the damaged portion.
A mold in which surface a concavo-convex pattern is formed, the mold for transferring a pattern to a substrate surface by pressing this concavo-convex shape, further comprising an alignment mark for determining a relative position to the substrate, wherein two or more of the alignment marks are formed on a concentric circle.
Dependencies are inferred from the claim text.