Semiconductor array and method for manufacturing a semiconductor array

Abstract

Semiconductor array, with an element region (400), with a conductive substrate (100), with a buried insulation layer (200), which isolates the element region (400) from the conductive substrate (100), with at least one trench (700), which is filled with an insulation material (710) and which isolates at least one element (1000) in the element region (400) from other elements in the element region (400), with an electrical conductor (750), which is connected conductively to the conductive substrate (100), wherein the electrical conductor (750) is disposed within the trench (700) isolated by the insulation material (710), and wherein the trench (700) is formed within a recess (600) in a surface. Furthermore, a method for manufacturing a semiconductor array is provided.

Dependencies are inferred from the claim text.