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US 2007/0164422 A1Published application
Semiconductor wafer scale package system
AssigneeSTATS ChipPAC, Ltd.
InventorsHyung Jun Jeon, Tae Keun Lee, Young Chan Ko
Life of this patent
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Abstract
A semiconductor wafer scale package system is provided including providing a semiconductor substrate having a through-hole via with a conductive coating, forming a filled via by filling the through-hole via with a conductive material, coupling a package substrate to the filled via, and singulating a chip scale package from the semiconductor substrate and the package substrate.
Claims20
A semiconductor wafer scale package system comprising:
- providing a semiconductor substrate having a through-hole via with a conductive coating;
- forming a filled via by filling the through-hole via with a conductive material;
- coupling a package substrate to the filled via;
- and
- singulating a chip scale package from the semiconductor substrate and the package substrate.
2 more elements
A semiconductor wafer scale package system comprising:
- providing a semiconductor substrate having a through-hole via lined with a conductive coating including forming the through-hole via near the edge of a semiconductor device;
- forming a filled via by filling the through-hole via with a conductive material including spraying or printing the conductive material;
- coupling a package substrate to the filled via including coupling all of the filled via on the semiconductor substrate to a package substrate;
- and
- singulating a chip scale package from the semiconductor substrate and the package substrate including singulating the chip scale package.
2 more elements
A semiconductor wafer scale package system comprising:
- a semiconductor substrate having a through-hole via lined with a conductive coating;
- a conductive material filling the through-hole via on the conductive coating;
- and
- a package substrate having a component interconnect, the component interconnect connected to the conductive material, and the package substrate having sides characteristic of being simultaneously singulated along with the semiconductor substrate being singulated from a semiconductor wafer.
1 more element
Dependencies are inferred from the claim text.