Design and fabrication method for microsensor

A method for fabricating a micro-sensor device comprising the steps of

• (i) fabricating on a parent substrate at least one sensor element,
• (ii) forming an interconnect layer having first and second surfaces remotely to the parent substrate so as to enclose the at least one sensor element between the first surface and the parent substrate,
• (iii) providing a plurality of electrical interconnections between the at least one sensor element and a plurality of terminations at the second surface of the interconnect layer, said terminations adapted to interface with a readout substrate,
• (iv) providing a readout substrate having a plurality of input connections disposed on a first surface thereof, said input connections arranged so as to substantially correspond with the terminations at the second surface of the interconnect layer,
• (v) interfacing the plurality of terminations with the corresponding input connections to form an integrated assembly, and
• (vi) removing the parent substrate from the integrated assembly within an area corresponding substantially with the at least one sensor element.