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US 2007/0164221 A1Published application
Microspectrometer gas analyzer
AssigneeRIC Investments, LLC
InventorJames Russell
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Abstract
A robust, compact spectrometer apparatus for determining respective concentrations or partial pressures of multiple gases in a gas sample with single as well as multiple and even overlapping, absorption or emission spectra that span a wide spectral range.
Claims6
A spectrometer comprising:
- an infrared source for projecting an infrared beam;
- a gas sample cell positioned in the path of the infrared beam;
- a scanning mirror bearing a diffraction grating comprising a plurality of parallel lines and positioned in the path of the infrared beam after passage thereof through the gas sample cell;
- a resonant scanner drive system adapted to oscillate the scanning mirror about an axis parallel to the diffraction grating lines;
- a first focusing element positioned to focus at least one band of interest of the infrared beam as diffracted by the diffraction grating;
- a first detector positioned to receive the at least one focused band of interest;
- and
- a first detector readout circuit operatively coupled to the first detector to receive a signal from the first detector.
5 more elements
Dependencies are inferred from the claim text.