Charged particle beam apparatus and methods for capturing images using the same

A method for imaging a sample by use of a charged particle beam apparatus, the method comprising the steps of:

• imaging a test sample by applying a charged particle beam to the test sample having a polyhedral pattern with a known shape formed thereon to scan the sample and by detecting secondary electrons generated from the test sample;
• obtaining the relationship between a position irradiated with the charged particle beam and the beam landing angle in a plurality of directions from the images of the test sample having a polyhedral pattern with a known shape formed thereon, obtained through imaging;
• and
• imaging the sample by applying the charged particle beam to the sample with a pattern formed on the surface thereof to scan the sample while controlling the charged particle beam based on the relationship between a position irradiated with the charged particle beam and the beam landing angle in the plurality of directions.

A charged particle beam apparatus comprising:

• a table means capable of moving within a plane;
• a charged particle beam irradiation means for applying a focused charged particle beam to a sample placed on the table means to scan the sample;
• a detection means for detecting secondary charged particles generated from the sample irradiated with the charged particle beam emitted from the charged particle beam irradiation means;
• a signal processing means for processing a detection signal of the secondary charged particles detected by the detection means and capturing images of the sample;
• a display means for displaying images of the sample obtained through processing executed by the signal processing means;
• and
• a control means for controlling the table means, the charged particle beam irradiation means, the detection means, the signal processing means, and the display means,
• wherein the signal processing means processes the detection signal of the secondary charged particles detected by the detection means by applying the charged particle beam to the test sample having a polyhedral pattern with a known shape formed thereon that is placed on the table means to scan the sample by use of the charged particle beam irradiation means, thereby obtaining information on the beam landing angle of the charged particle beam to be applied to the sample by the charged particle beams irradiation means;
• and
• wherein the control means controls the charged particle beam irradiation means based on the information on the beam landing angle of the charged particle beam obtained by the signal processing means, thereby setting the beam landing angle of the charged particle beam to a desired angle.

A charged particle beam apparatus comprising:

• a charged particle beam irradiation means for applying a focused charged particle beam to a sample to scan the sample;
• an image capturing means for capturing images of the sample by detecting secondary charged particles generated from the sample irradiated with a charged particle beam emitted from the charged particle beam irradiation means;
• an image processing means for processing images captured by the image capturing means;
• a display means for displaying images of the sample captured by the image capturing means;
• and
• a control means for controlling the charged particle beam irradiation means, the image capturing means, the image processing means, and the display means,
• wherein the image processing means causes the charged particle beam irradiation means to apply the charged particle beam to the test sample having a polyhedral pattern with a known shape formed thereon to scan the sample, and processes images captured by the image capturing means, thereby obtaining information on the relationship between a position irradiated by the charged particle beam and the beam landing angle in a plurality of directions;
• and
• wherein the control means controls the charged particle beam irradiation means based on the information on the relationship between a position irradiated with the charged particle beam and the beam landing angle in the plurality of directions, that are obtained by the image processing means.