Conductive carbon nanotube tip, probe having the conductive carbon nanotube tip, and method of manufacturing the conductive carbon nanotube tip
AssigneeSamsung Electronics Co., Ltd.
InventorsSang-jun Choi, Jung-Hyun Lee, Sang-bong Bang, Bum-seok Seo, Chang-soo Lee
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Abstract
A conductive carbon nanotube tip and a manufacturing method thereof are provided. The conductive carbon nanotube tip includes a carbon nanotube tip substantially vertically placed on a substrate, and a ruthenium coating layer covering a surface of the carbon nanotube tip and extending to at least a part of the substrate. The manufacturing method includes substantially vertically placing a carbon nanotube tip on a substrate, and forming a ruthenium coating layer on the carbon nanotube tip and at least a part of the substrate.
Claims13
A conductive carbon nanotube tip comprising:
- a carbon nanotube tip substantially vertically placed on a substrate;
- and
- a ruthenium coating layer covering a surface of the carbon nanotube tip and extending to at least a part of the substrate.
A probe of a scanning probe microscope, comprising:
- a cantilever having a first end fixed on a support;
- a carbon nanotube tip substantially vertically placed on the cantilever near a second end thereof;
- and
- a ruthenium coating layer covering a surface of the carbon nanotube tip and extending to at least a part of the cantilever.
A method of manufacturing a conductive carbon nanotube tip, comprising:
- substantially vertically placing a carbon nanotube tip on a substrate;
- and
- forming a ruthenium coating layer on the carbon nanotube tip and at least a part of the substrate.
Dependencies are inferred from the claim text.