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US 2007/0163715 A1Published application
Laser Nozzle Methods And Apparatus For Surface Cleaning
AssigneeSematech, Inc.
InventorAbbas Rastegar
Life of this patent
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Abstract
Apparatuses and methods for cleaning a surface comprising contaminate particles are provided. In one respect, plasma and/or a shockwave may be created in a fluid flowing through a nozzle. The nozzle, coupled to a laser source and a fluid feed may be configured to deliver the generated plasma and/or shockwave to the surface.
Claims13
An apparatus for removing contaminant particles from a surface, comprising:
- a nozzle operably moveable to a location adjacent to a surface;
- a fluid feed coupled to the nozzle for providing a fluid flow through the nozzle;
- a light source coupled to the nozzle for providing light from the light source, the light generating plasma and a shockwave within the fluid flow, where the generated plasma and shockwave are provided to the surface by the nozzle for removing contaminant particles from the surface.
A method for removing particles from a surface comprising:
- providing a fluid through a nozzle;
- focusing light onto the fluid within the nozzle for generating plasma and a shockwave in the fluid within the nozzle;
- providing the generated plasma and shockwave to a surface, the plasma and shockwave removing contaminant particles from the surface.
Dependencies are inferred from the claim text.