Etch chamber
OwnerHong Jin Kim, Jose Angeles Talban +2inventors
InventorsHong Jin Kim, Jose Angeles Talban, Abdul Rahim Abdul Malik, Ronnie San Diego David
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Abstract
An etch chamber and a method of reducing back flow of particles in an etch chamber having a valve connected thereto. The etch chamber comprises a valve connected to the etch chamber; and a liner a liner disposed to cover an internal gap between a flange portion of the valve and a flange portion of the etch chamber.
Claims19
An etch chamber comprising:
- a valve connected to the etch chamber;
- and
- a liner disposed to cover an internal gap between a flange portion of the valve and a flange portion of the etch chamber.
A method of reducing back flow of particles in an etch chamber having a valve connected thereto, the method comprising the step of providing a liner to cover an internal gap between a flange portion of the valve and a flange portion of the etch chamber.
Dependencies are inferred from the claim text.