Chemical dispensing apparatus of FOX process device
OwnerJae-Hyuk Lee, Suk-Hoon Mooninventors
Life of this patent
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Abstract
A chemical dispensing apparatus adapted to perform a FOX process and further adapted to eliminate contamination particles from a chemical solution being dispensed on a wafer. The chemical dispensing apparatus includes a helium gas container, a first bottle, a second bottle, a first helium supply pipe, a second helium supply pipe, a first regulator, a second regulator, a first air valve, a second air valve, a first chemical supply pipe, a manual valve, a second chemical supply pipe, a filter, a flowmeter, a suck back control valve, a nozzle, a first vent line, a first pressure sensor, a first vent valve, a second pressure sensor, and a second vent valve.
Claims11
A chemical dispensing apparatus adapted for use in the performance of a flow oxide (FOX) process, the apparatus comprising:
- a first bottle adapted to store a chemical solution;
- a nozzle adapted to apply the chemical solution to a wafer;
- a first chemical supply pipe connecting the first bottle and the nozzle and comprising a filter adapted to remove contaminate particles from the chemical solution applied to the wafer.
A chemical dispensing apparatus adapted for use in the performance of a flow oxide (FOX) process, the apparatus comprising:
- a first bottle adapted to store a chemical solution;
- a nozzle adapted to apply the chemical solution to a wafer;
- a first chemical supply pipe connecting the first bottle and the nozzle and comprising a filter adapted to remove contaminate particles from the chemical solution applied to the wafer;
- a second bottle adapted to store supplemental chemical solution;
- a first helium supply pipe connected between a helium gas container and the first bottle;
- a second helium supply pipe connected between the helium gas container and the second bottle;
- a second chemical supply pipe adapted to transfer supplemental chemical solution from the second bottle to the first bottle;
- a manual valve install on the second chemical supply pipe and adapted to switch on and off the transfer flow of chemical solution from the second bottle to the first bottle;
- a flowmeter installed on the first chemical supply pipe and adapted to measure flow of the chemical solution from the first bottle to the nozzle;
- and
- a suck back control valve installed on the first chemical supply pipe and adapted to apply a suck back vacuum to the first chemical supply pipe.
Dependencies are inferred from the claim text.