Semiconductor device and manufacturing method thereof
AssigneeSemiconductor Energy Laboratory Co., Ltd.
InventorYasuyuki Arai
Life of this patent
Estimating the term…
Abstract
A semiconductor device is provided, which comprises a first electrode, crystalline semiconductor particles, a semiconductor layer, and a second electrode. The crystalline semiconductor particles of which adjacent particles are fusion-bonded, the crystalline semiconductor particles have a first conductivity type, and the semiconductor layer has a second conductivity type which is different from the first conductivity type.
Claims36
A semiconductor device comprising:
- a first electrode,
- crystalline semiconductor particles over the first electrode,
- a semiconductor layer over the crystalline semiconductor particles, and
- a second electrode over the semiconductor layer,
- wherein:
- the crystalline semiconductor particles of which adjacent particles are fusion-bonded,
- the crystalline semiconductor particles have a first conductivity type, and
- the semiconductor layer has a second conductivity type which is different from the first conductivity type.
A semiconductor device comprising:
- a first electrode,
- crystalline semiconductor particles over the first electrode,
- a semiconductor layer over the crystalline semiconductor particles, and
- a second electrode over the semiconductor layer,
- wherein:
- the crystalline semiconductor particles of which adjacent particles are fusion-bonded, and in which at least two crystalline semiconductor particles are stacked,
- the crystalline semiconductor particles have a first conductivity type, and
- the semiconductor layer has a second conductivity type which is different from the first conductivity type.
A semiconductor device comprising:
- a first electrode,
- a first semiconductor layer over the first electrode,
- crystalline semiconductor particles over the first semiconductor layer,
- a second semiconductor layer over the crystalline semiconductor particles, and
- a second electrode over the second semiconductor layer,
- wherein:
- the crystalline semiconductor particles of which adjacent particles are fusion-bonded,
- the first semiconductor layer has a first conductivity type, and
- the second semiconductor layer has a second conductivity type which is different from the first conductivity type.
A manufacturing method of a semiconductor device comprising:
- forming a first electrode,
- forming crystalline semiconductor particles over the first electrode, that have a first conductivity type,
- heating the first electrode to fix the crystalline semiconductor particles to the first electrode,
- fusion-bonding adjacent particles of the crystalline semiconductor particles,
- forming a semiconductor layer over the crystalline semiconductor particles, that has a second conductivity type which is different from the first conductivity type, and
- forming a second electrode over the semiconductor layer.
A manufacturing method of a semiconductor device comprising:
- forming a first electrode,
- forming a first crystalline semiconductor particles over the first electrode, that have a first conductivity type,
- heating the first electrode to fix the first crystalline semiconductor particles to the first electrode,
- fusion-bonding adjacent particles of the first crystalline semiconductor particles,
- forming a second crystalline semiconductor particles over the first crystalline semiconductor particles, that have the first conductivity type,
- fusion-bonding adjacent particles of the second crystalline semiconductor particles,
- forming a semiconductor layer over the second crystalline semiconductor particle, that has a second conductivity type which is different from the first conductivity type, and
- forming a second electrode over the semiconductor layer.
A manufacturing method of a semiconductor device comprising:
- forming a first electrode,
- forming a first semiconductor layer over the first electrode, that has a first conductivity type,
- forming crystalline semiconductor particles over the semiconductor layer,
- fusion-bonding the crystalline semiconductor particles,
- forming a second semiconductor layer over the crystalline semiconductor particles, that has a second conductivity type which is different from the first conductivity type, and
- forming a second electrode over the second semiconductor layer.
Dependencies are inferred from the claim text.