Nozzle for substrate treatment apparatus
OwnerPyoung-Ho Lim, Jong-Kook Song +1inventors
InventorsPyoung-Ho Lim, Jong-Kook Song, Han-Mil Kim
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Abstract
Provided are a nozzle and a related substrate treatment apparatus. The substrate treatment apparatus includes a process chamber, a supporting member disposed in the process chamber to support substrates, and a nozzle disposed in the process chamber to supply treatment fluid. The nozzle includes an outer tube along which a plurality of spraying holes are formed and which has a first end that is closed and an inner tube inserted into the outer tube through a hole formed on a second end of the outer tube.
Claims18
A substrate treatment apparatus comprising:
- a process chamber;
- a supporting member disposed in the process chamber and adapted to support wafers forming substrates;
- and
- a nozzle disposed in the process chamber and adapted to supply treatment solution, wherein the nozzle comprises:
- an outer tube comprising a plurality of spraying holes and a closed first end and an opposing second end;
- and
- an inner tube adapted to receive a flow of treatment solution and inserted into the outer tube through the second end of the outer tube.
A nozzle comprising:
- an inner tube adapted to receive a flow of treatment solution at a proximate end and pass the treatment solution in a first direction from an open distal end;
- and
- an outer tube having a closed first end facing and proximate to the distal end of the inner tube, the outer tube enclosing the inner tube and being provided with a plurality of spraying holes formed along the length of the outer tube,
- wherein treatment solution passing from the inner tube collides with the first end of the outer tube and back-flows into a space between the inner and outer tubes in a second direction opposite the first direction.
A nozzle comprising:
- a plurality of tubes, wherein a treatment solution is introduced through an inner most tube among the plurality of tubes, the treatment solution passes from the innermost tube to collide with a sidewall of an intermediate tube enclosing the innermost tube to cause back-flowing of the treatment solution through a space between the innermost tube and the intermediate tube, and an outermost tube comprises a plurality of spraying holes adapted to spray the treatment solution at a substantially uniform discharge flows.
Dependencies are inferred from the claim text.