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US 2007/0163494 A1Published application
Rotatable aperture mask assembly and deposition system
Assignee3M Innovative Properties Company
InventorsJeffrey TOKIE, Donald MCCLURE
Life of this patent
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Abstract
An aperture mask assembly includes a rotatable frame and a mask having apertures. A clamping arrangement is used to tension the mask and to conform the mask to a shape defined by the frame. Tension is applied to the mask in a direction substantially parallel to an axis of the frame and/or around the circumference of the shape defined by the frame. Deposition material emanating from a deposition source located within the rotatable frame is deposited through the mask apertures onto a web.
Claims23
An apparatus, comprising:
- a rotatable frame;
- a mask having apertures;
- and
- a clamping arrangement configured to tension the mask and to conform the mask to a shape defined by the frame.
1 more element
A deposition system, comprising:
- a chamber including a deposition region;
- a rotatable frame assembly disposed within the chamber, the frame assembly comprising:
- a frame;
- a mask having one or more apertures;
- and
- a clamping arrangement configured to tension the mask and to conform the mask to a shape defined by the frame;
- a deposition source disposed within the deposition region;
- and
- a web drive mechanism configured to move a web in relation to the deposition source to allow deposition of a material from the deposition source onto the web through the apertures of the mask.
6 more elements
An aperture mask assembly, comprising:
- a rotatable frame;
- a mask having apertures configured to allow deposition of a material through the frame and through the apertures;
- and
- means for tensioning the mask and conforming the mask to a shape defined by the frame.
1 more element
Dependencies are inferred from the claim text.