Gas separation type showerhead
AssigneeAtto Co., Ltd.
InventorsKyung Kim, Guen Bae, Ho Kim
Life of this patent
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Abstract
Provided is a gas separation type showerhead for effective energy supply. The gas separation type showerhead includes: a gas supply module to which a first gas and a second gas are separately supplied; a gas separation module in which the supplied first and second gases are separately dispersed; and a gas injection module which is a multi-hollow cathode having a plurality of holes and in which the first and second gases separately dispersed are ionized in the holes to be commonly dispersed.
Claims46
A gas separation type showerhead comprising:
- a gas supply module to which a first gas and a second gas are separately supplied;
- a gas separation module in which the supplied first and second gases are separately dispersed;
- and
- a gas injection module which includes a plurality of holes and in which the first and second gases separately dispersed are commonly injected through the holes,
- wherein a lower part of the gas separation module, through which the first and second gases are vented to the gas injection module, has a variable height.
A gas separation type showerhead comprising:
- a gas supply module to which a first gas and a second gas are separately supplied;
- a gas separation module in which the supplied first and second gases are separately dispersed;
- and
- a gas injection module which is a multi-hollow cathode having a plurality of holes and in which the first and second gases separately dispersed are ionized in the holes to be commonly dispersed.
A gas separation type showerhead comprising:
- a gas supply module to which a first gas and a second gas are separately supplied;
- a gas separation module in which the supplied first and second gases are separately dispersed, and at least one of the first and second gases are ionized;
- and
- a gas injection module which includes a plurality of holes and in which the first and second gases separately dispersed are commonly injected through the holes,
- wherein at least a part of the gas injection module is an insulator.
Dependencies are inferred from the claim text.