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US 2007/0163335 A1Published application
Method and apparatus for measuring electrical properties in torsional resonance mode
AssigneeVeeco Instruments Inc.
InventorsLin Huang, Chanmin Su
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Abstract
The preferred embodiments are directed to a method and apparatus of operating a scanning probe microscope (SPM) including oscillating a probe of the SPM at a torsional resonance of the probe, and generally simultaneously measuring an electrical property, e.g., a current, capacitance, impedance, etc., between a probe of the SPM and a sample at a separation controlled by the torsional resonance mode. Preferably, the measuring step is performed while using torsional resonance feedback to maintain a set-point of SPM operation.
Claims21
1-33. (canceled)
An apparatus for measuring a sample comprising:
- a probe holder supporting a probe having a tip extending substantially orthogonally to the sample;
- a torsional resonance mode actuator that couples energy to said probe to oscillate said probe at a torsional resonance thereof;
- a conductor, wherein said conductor is in electrical communication with said probe;
- an electrical property measuring detector for measuring an electrical property of the sample, wherein the sample is disposed between said probe and said conductor;
- and
- wherein a probe-sample separation is less than about 10 nm.
3 more elements
Dependencies are inferred from the claim text.