Pressure control method
AssigneeEdwards Limited
InventorMartin Tollner
Life of this patent
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Abstract
The present invention relates to a method of setting the pressure in a chamber of a vacuum system to a required pressure, the system comprising a pressure control system including a pump for evacuating gas from the chamber and a flow controller for allowing the flow of gas into the chamber, the method comprising setting an initial flow into and/or out of the chamber for achieving a pressure above the required pressure so as to increase the rate of pressure increase, the initial flow occurring over a transient period which does not allow the pressure to exceed the required pressure, and setting a preset flow into and/or out of the chamber after the transient period has elapsed for achieving and maintaining the required pressure. Iperiod has elapsed for achieving and maintaining the required pressure.
Claims22
A method of setting the pressure in a chamber of a vacuum system to a required pressure, the system comprising a pressure control system including a pump for evacuating gas from the chamber and a flow controller for allowing the flow of gas into the chamber, the method comprising setting an initial flow out of the chamber for achieving a pressure above the required pressure so as to increase the rate of pressure increase, the initial flow occurring over a transient period which does not allow the pressure to exceed the required pressure, and setting a preset flow out of the chamber after the transient period has elapsed for achieving and maintaining the required pressure.
Dependencies are inferred from the claim text.