Hysteretic MEMS two-dimensional thermal device and method of manufacture
AssigneeInnovative Micro Technology
InventorPaul Rubel
Life of this patent
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Abstract
A MEMS hysteretic thermal device may have two passive beam segments driven by a current-carrying loop coupled to the surface of a substrate. The first beam segment is configured to move in a direction having a component perpendicular to the substrate surface, whereas the second beam segment is configured to move in a direction having a component parallel to the substrate surface. By providing this two-dimensional motion, a single MEMS hysteretic thermal device may by used to close a switch having at least one stationary contact affixed to the substrate surface.
Claims20
A hysteretic micromechanical device formed on a surface of a substrate, comprising:
- a first beam segment configured to move in a direction having a component perpendicular to the substrate surface;
- a second beam segment configured to move in a direction having a component parallel to the substrate surface;
- a flexure joining the first beam segment to the second beam segment, wherein the first beam segment and the second beam segment are driven in a first trajectory during activation and a second trajectory during relaxation.
A method of manufacturing a hysteretic micromechanical device on a surface of a substrate comprising:
- forming a first beam segment configured to move in a direction having a component perpendicular to the substrate surface;
- forming a second beam segment configured to move in a direction having a component parallel to the substrate surface;
- forming a flexure joining the first beam segment to the second beam segment, wherein the first beam segment and the second beam segment are driven in a first trajectory during activation and a second trajectory during relaxation.
An apparatus for forming a hysteretic micromechanical device on a surface of a substrate, comprising:
- means for forming a first beam segment configured to move in a direction having a component perpendicular to the substrate surface;
- means for forming a second beam segment configured to move in a direction having a component parallel to the substrate surface;
- means for forming a flexure joining the first beam segment to the second beam segment, wherein the first beam segment and the second beam segment are driven in a first trajectory during activation and a second trajectory during relaxation.
Dependencies are inferred from the claim text.