Rare earth metal member and making method
AssigneeShin-Etsu Chemical Co., Ltd.
InventorsToshihiko Tsukatani, Hajime Nakano, Takao Maeda
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Abstract
By using a rare earth metal having a minimal content of impurity metal element, machining it into a member and cleaning with an organic acid-base capping agent, there is obtained a rare earth metal member composed entirely of a rare earth metal and containing not more than 100 ppm of impurity metal element in a sub-surface zone, which member is characterized by a high surface purity, a large grain size, minimized grain boundaries, and improved halogen resistance or corrosion resistance.
Claims14
A rare earth metal member consisting essentially of a rare earth metal and having an outermost surface, said member containing not more than 100 ppm of at least one metal element other than the rare earth metal in a zone extending from the outermost surface to a depth of 2 μm.
A rare earth metal member consisting essentially of a rare earth metal and containing not more than 100 ppm of at least one metal element other than the rare earth metal.
Dependencies are inferred from the claim text.