A method of synthesizing nanoscale filamentary structures and electronic components comprising such structures
AssigneesCentre National de la Recherche, Ecole Polytechnique
InventorDidier Pribat
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Abstract
A method of synthesizing electronic components incorporating nanoscale filamentary structures in which method a metallic catalyst is deposited in a nanoporous membrane, the catalyst being adapted to penetrate in at least some of the pores of the nanoporous membrane, and filamentary structures are grown on the catalyst in at least some of the pores in the nanoporous membrane. The nanoporous membrane is prepared in a manner suitable for ensuring that the wall of the pores include a single-crystal zone, and at least part of the catalyst is grown epitaxially on said single-crystal zone.
Claims25
A method of synthesizing electronic components incorporating nanoscale filamentary structures, the method comprising the operations consisting in:
- depositing, in an nanoporous membrane, a metal catalyst suitable for penetrating into at least some of the pores of the nanoporous membrane;
- and
- causing filamentary structures to grow on the catalyst in at least some of the pores in the nanoporous membrane;
- the method being characterized by the fact that it further comprises the operations of preparing the nanoporous membrane in a manner suitable for ensuring that the wall of the pores includes a single-crystal zone, and growing at least some of the catalyst epitaxially on said single-crystal zone.
Dependencies are inferred from the claim text.