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US 2006/0263979 A1Published application
Methods of forming devices associated with semiconductor constructions
AssigneeMicron Technology, Inc.
InventorsHasan Nejad, Gordon Haller, Thomas Figura, Ravi Iyer
Life of this patent
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Abstract
The invention includes methods of forming devices associated with semiconductor constructions. In exemplary methods, common processing steps are utilized to form fully silicided recessed array access gates and partially silicided periphery transistor gates.
Claims29
A method of forming devices associated with a semiconductor construction, comprising:
- providing a semiconductor substrate, the substrate having a memory array region and a peripheral region proximate the memory array region;
- the substrate having recessed access device trenches within the memory array region, and having interconnect line corridors within the peripheral region;
- forming silicon-containing material within the recessed access device trenches and within the interconnect line corridors;
- and
- simultaneously converting some of the silicon-containing material within the interconnect line corridors to a metal silicide and at least some of the silicon-containing material within the recessed access device trenches to the metal silicide.
2 more elements
A method of forming devices associated with a semiconductor construction, comprising:
- providing a semiconductor substrate, the substrate having a memory array region and a peripheral region proximate the memory array region;
- the substrate having recessed access device trenches within the memory array region, and having gate line corridors within the peripheral region;
- forming silicon-containing material within the recessed access device trenches and within the gate line corridors, the silicon-containing material within the gate line corridors and recessed access device trenches being first and second portions of the silicon-containing material, respectively;
- forming a first metal-containing layer over the first and second portions of the silicon-containing material;
- utilizing metal from the first metal-containing layer to convert upper regions of the first and second portions of the silicon-containing material to first and second portions of a first metal silicide, respectively;
- the converted upper regions of the first and second portions of the silicon-containing material being over non-converted lower regions of the first and second portions of the silicon-containing material;
- forming a barrier layer over the first portion of the first metal silicide;
- forming a second metal-containing layer over the barrier layer and over the second portion of the first metal silicide;
- and
- utilizing metal from the second metal-containing layer to convert at least some of the lower region of the second portion of the silicon-containing material to a second metal silicide.
7 more elements
A method of forming devices associated with a semiconductor construction, comprising:
- providing a semiconductor substrate, the substrate having a memory array region and a peripheral region proximate the memory array region;
- the substrate having recessed access device trenches within the memory array region, and having gate line corridors within the peripheral region;
- forming silicon-containing material within the recessed access device trenches and within the gate line corridors;
- forming a metal-containing layer over the silicon-containing material, the metal-containing layer having a first portion directly over the recessed access device trenches and having a second portion directly over the gate line corridors;
- the first portion of the metal-containing layer being substantially thicker than the second portion of the metal-containing layer;
- and
- utilizing metal from the metal-containing layer to convert silicon-containing material within the gate line corridors to metal silicide and to convert silicon-containing material within the recessed access device trenches to metal silicide.
4 more elements
Dependencies are inferred from the claim text.