Methods and apparatus for filling a microswitch with liquid metal
OwnerMarco Aimi, Timothy Beerling +1inventors
InventorsMarco Aimi, Timothy Beerling, Kevin Killeen
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Abstract
Enclosed (or at least substantially enclosed) microswitch cavities can be constructed with suitable channels, and in some instances vents, to allow for the transport of fluidic microswitch components to the cavities. This generally allows for fluid transport to cavities that are largely completed. Various techniques, including formation of pressure gradients and electrowetting, can be used to transport fluid along the channels. Additionally, structures and techniques for providing fluid to multiple microswitches and for providing fluid in desired amounts to microswitches are disclosed.
Claims20
An apparatus comprising:
- a device substrate;
- a substantially enclosed microswitch cavity at least partially defined by a portion of the device substrate;
- and
- a channel coupled to the substantially enclosed microswitch cavity and configured to deliver a fluidic component of a microswitch to the substantially enclosed microswitch cavity.
A method comprising:
- providing a substantially enclosed microswitch cavity;
- transporting a fluidic component of a microswitch along a channel coupled to the substantially enclosed microswitch cavity.
An apparatus comprising:
- a means for containing a fluid for use in a means for switching;
- and
- a means for transporting the fluid from a first means for supplying the fluid to the means for switching.
Dependencies are inferred from the claim text.