Extended kalman filter incorporating offline metrology
AssigneeMicron Technology, Inc.
InventorJim Hofmann
Life of this patent
Estimating the term…
Abstract
An algorithm uses offline metrology to control a process by passing information from an outer control loop to an inner control loop, extended Kalman filter estimator. The inner control loop operates online, and the outer control loop operates asynchronously with respect to the inner control loop. The online control loop is updated for each subsequent process. The offline metrology is optionally updated for each subsequent process.
Claims34
A computer readable medium for executing a set of instructions, the computer readable medium comprising:
- in an inner loop:
- establishing estimates of state variables of a substrate planarizing cycle, wherein establishing includes the use of an extended Kalman filter engine;
- and
- estimating the endpoint of the substrate planarizing cycle based upon the estimates of the state variables;
- in an outer loop:
- asynchronously comparing at least one of a state variable and an endpoint to an offline metrology database;
- and
- sending and information statement from the outer loop to the inner loop.
A computer readable medium for executing a set of instructions, the computer readable medium comprising:
- estimating state variables of a physical process by use of an extended Kalman filter engine operating in an online control loop;
- and
- transmitting the estimated state variables to a control loop of the physical process, including at least one of an estimated endpoint of the physical process based upon the estimates of the state variables, estimated total reflectance of a substrate that includes an array and a periphery region;
- and an estimated instantaneous change in reflectance of the substrate.
A computer readable medium for executing a set of instructions, the computer readable medium comprising:
- instructions for communicating with a physical interface;
- instructions for communicating with an online first, extended Kalman filter estimator;
- instructions for communicating with an offline metrology data base including a second extended Kalman filter engine estimator;
- communicating an information statement from the offline metrology data base to the first extended Kalman filter engine estimator;
- and
- communicating a control statement from the online extended Kalman filter engine estimator to the physical interface.
A computer readable medium for executing a set of instructions, the computer readable medium comprising:
- instructions for communicating with a chemical-mechanical polishing interface;
- instructions for communicating with an online first, extended Kalman filter extended Kalman filter engine estimator;
- instructions for communicating with an offline metrology data base including a second extended Kalman filter engine estimator;
- communicating an information statement from the offline metrology data base to the first extended Kalman filter engine estimator;
- and
- communicating a control statement from the online extended Kalman filter engine estimator to the chemical-mechanical polishing interface.
A computer readable medium for executing a set of instructions, the computer readable medium comprising:
- instructions for communicating with a physical interface;
- instructions for communicating with an online first, extended Kalman filter estimator;
- instructions for communicating with an offline metrology data base in communication with the online estimator;
- instructions for sending an information statement from the offline metrology data base to the extended Kalman filter estimator;
- and
- instructions for sending a control statement from the online extended Kalman filter estimator to the physical interface.
A computer readable medium for executing a set of instructions in a cyclic process, comprising:
- an outer control loop, sending process parameter data from an nth process run, where n is an integer greater than zero, to update and improve accuracy in a process parameter;
- an inner control loop including an extended Kalman filter receiving the process parameter data, calculating an updated process parameter and sending the updated process parameter to a process parameter controller;
- and
- the process parameter controller receiving the updated process parameter and applying the updated process parameter to the (n +m)th process run, where m is greater than one.
A computer readable medium for executing a set of instructions, the computer readable medium comprising:
- estimating a state variable for a physical process by use of an extended Kalman Filter that operates in an online control loop;
- applying a control statement to the physical process from the online control loop;
- and
- sending an information statement from an offline metrology control loop to the online control loop, wherein the information statement optionally changes estimating the state variable.
Dependencies are inferred from the claim text.