Method of scavenging intermediate formed by reaction of oxidoreductase with substrate

A process system comprising:

• a process apparatus which performs a predetermined process on an object to be processed;
• a plurality of detection means which detect statuses in the process apparatus;
• an abnormality detection section which detects an abnormality in detection information from the plurality of detection means;
• an alarm generation section which generates an alarm when the abnormality detection section detects an abnormality;
• an information storage section which stores the detection information from the detection means and alarm information as a process history of the process apparatus and prestores an alarm table describing brief information according to individual alarms and linkable to the process history;
• an alarm-related information acquisition section which selects brief information on an alarm selected from the alarm table in the information storage section and acquires, as link information, sequential information leading to generation of the selected alarm from information stored as the process history in the information storage section;
• and
• a display section which displays alarm-related information acquired by the alarm-related information acquisition section.

A process system comprising:

• a plurality of process apparatuses which perform a predetermined process on an object to be processed;
• an apparatus control unit which controls the plurality of process apparatuses based on information to be detected in the process apparatuses, detects an abnormality when the information to be detected in the process apparatuses is off a predetermined range, and generates an alarm when the abnormality detection section detects an abnormality;
• and
• a control apparatus which receives all or nearly all process information from the process apparatuses, and controls the process apparatuses based on the process information, and which includes
• an information storage section which stores the process information and alarm information received from the process apparatuses as process histories of the process apparatuses,
• an alarm-related information acquisition section which acquires information relating to an alarm selected from generated alarms from the information storage section, and
• a display section which displays alarm-related information acquired by the alarm-related information acquisition section.

A process system comprising:

• a plurality of process apparatuses which perform a predetermined process on an object to be processed;
• an apparatus control unit which controls the plurality of process apparatuses based on information to be detected in the process apparatuses, detects an abnormality when the information to be detected in the process apparatuses is off a predetermined range, and generates an alarm when the abnormality detection section detects an abnormality;
• and
• a control apparatus which receives all or nearly all process information from the process apparatuses, and controls the process apparatuses based on the process information, and which includes
• an information storage section which stores the process information and alarm information received from the process apparatuses as process histories of the process apparatuses, and prestores an alarm table describing brief information according to individual alarms and linkable to the process history,
• an alarm-related information acquisition section which selects brief information on an alarm selected from the alarm table in the information storage section and acquires, as link information, sequential information leading to generation of the selected alarm from information stored as the process histories in the information storage section, and
• a display section which displays alarm-related information acquired by the alarm-related information acquisition section.

A process method comprising:

• storing detection information from a plurality of detection means provided in a process apparatus, which performs a predetermined process on an object to be processed, and information on alarms to be generated when detecting an abnormality in the detection information from the plurality of detection means, as a process history in an information storage section;
• prestoring an alarm table describing brief information according to individual alarms and linkable to the process history;
• selecting brief information on an alarm selected from the alarm table in the information storage section;
• acquiring, as link information, sequential information leading to generation of the selected alarm from information stored as the process history in the information storage section;
• and displaying information selected from the alarm table and the acquired sequential information leading to generation of the selected alarm.