Fluorine-containing elastomer composition excellent in plasma-aging prevention effect and shaped article made thereof
AssigneeDaikin Industries, Ltd.
InventorsHiroyuki Tanaka, Kouji Fukuyama, Tsuyoshi Noguchi
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Abstract
The present invention provides a fluorine containing elastomer composition which does not affect heat resistance and processability, is little in weight change for both of fluorine plasma and oxygen plasma exposed at the production step of a semiconductor and can inhibit generation of foreign objects (particles) significantly in those steps, and a molded article comprising the composition. The present invention relates to a fluorine containing elastomer composition for the seal material of a semiconductor production device comprising a fluorine containing elastomer and a compound having plasma antiaging effects.
Claims18
A fluorine containing elastomer composition for a seal material of a semiconductor production device comprising a fluorine containing elastomer and a compound having plasma antiaging effects,
- wherein said compound having plasma antiaging effects is at least one selected from the group consisting of an isoindolinone pigment, a quinacridone pigment, a diketopyrrolopyrrole pigment and an anthraquinone pigment.
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A fluorine containing elastomer composition for a seal material of a semiconductor production device comprising a fluorine containing elastomer and a compound having plasma antiaging effects,
- wherein said compound having plasma antiaging effects is an aromatic compound and said aromatic compound is a compound satisfying at least one condition selected from the group consisting of:
- (1) —NH— composes one portion of the ring structure of the aromatic compound, or one side of —NH— is directly bonded with the ring structure of the aromatic compound;
- (2) —C(O)— composes one portion of the ring structure of the aromatic compound;
- (3) —S— is directly bonded with the ring structure of the aromatic compound;
- (4) —OH is directly bonded with the ring structure of the aromatic compound;
- and
- (5) at least one side of (—O—)3P is directly bonded with the ring structure of the aromatic compound.
Dependencies are inferred from the claim text.