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US 2006/0234477 A1Published application
Glass-based semiconductor on insulator structures and methods of making same
AssigneeCorning Incorporated
InventorKishor Gadkaree
Life of this patent
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Abstract
Methods and apparatus provide for: a semiconductor wafer; at least one porous layer in the semiconductor wafer; an epitaxial semiconductor layer directly or indirectly on the porous layer; and a glass substrate bonded to the epitaxial semiconductor layer via electrolysis.
Claims31
A method of forming a semiconductor on glass structure, comprising:
- creating first and second porous layers in a semiconductor wafer, the second layer being below the first layer and including at least mostly larger pores than the first layer;
- forming an epitaxial semiconductor layer directly or indirectly on the first porous layer;
- bonding a glass substrate to the epitaxial semiconductor layer using electrolysis;
- and
- applying stress to at least one of the first and second porous layers such that the bonded glass substrate and epitaxial semiconductor layer separates from the semiconductor wafer.
2 more elements
A method of forming a semiconductor on glass structure, comprising:
- creating a porous layer in a semiconductor wafer using anodization;
- forming an epitaxial semiconductor layer directly or indirectly on the porous layer;
- bonding a glass substrate to the epitaxial semiconductor layer using electrolysis;
- and
- applying stress to at least the porous layer such that the bonded glass substrate and epitaxial semiconductor layer separates from the semiconductor wafer.
2 more elements
A silicon on insulator structure, comprising:
- a glass substrate;
- and
- an epitaxially formed layer of semiconductor material bonded to the glass substrate via electrolysis.
An apparatus, comprising:
- a semiconductor wafer;
- a porous layer in the semiconductor wafer;
- an epitaxial semiconductor layer directly or indirectly on the porous layer;
- and
- a glass substrate bonded to the epitaxial semiconductor layer via electrolysis.
2 more elements
Dependencies are inferred from the claim text.