Magnetic annealing sequences for patterned MRAM synthetic antiferromagnetic pinned layers
AssigneeMicron Technology, Inc.
InventorJames Deak
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AssigneeMicron Technology, Inc.
InventorJames Deak
Estimating the term…
A method is provided for fabricating a fixed layer for a MRAM device. The method includes providing the fixed layer. The fixed layer includes an antiferromagnetic pinning layer over a substrate and a ferromagnetic pinned layer over the pinning layer, the pinned layer having a first thickness. The fixed layer further includes a spacer layer over the pinned layer, and a ferromagnetic reference layer over the spacer layer, the reference layer having a second thickness. The method further includes annealing the fixed layer using a temporal temperature/magnetic field profile, the profile having a maximum magnetic field magnitude (Hanneal). The profile is selected based on the first thickness of the pinned layer and the second thickness of the reference layer.
A method for fabricating a magnetic memory device, comprising:
A method for fabricating an integrated circuit (IC) device, comprising:
A method for fabricating an MRAM device, the method comprising:
Dependencies are inferred from the claim text.