Apparatus and method for heating substrate and coating and developing system
AssigneeTokyo Electron Limited
InventorsShinichi Hayashi, Tetsuo Fukuoka, Tetsuya Oda, Hiroaki Inadomi
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Abstract
A substrate heating apparatus includes a top plate arranged above a hot plate so that a vertical space is formed between the hot plate and the top plate. The top plate has an evacuated internal chamber serving as a vacuum insulating layer that suppresses heat transfer from a first surface of the top plate facing the hot plate to a second surface of the top plate opposite to the first surface. When heating the substrate, a gas flow flowing through the space between the hot plate and the top plate is generated.
Claims22
A substrate heating apparatus comprising:
- a hot plate adapted to heat a substrate coated with a coating solution while supporting the substrate thereon;
- a top plate arranged above the hot plate so that a vertical space is formed between the hot plate and the top plate, the top plate having an evacuated internal chamber serving as a vacuum insulating layer that suppresses heat transfer from a first surface of the top plate facing the hot plate to a second surface of the top plate opposite to the first surface;
- and
- means for generating a gas flow flowing through the space between the hot plate and the top plate.
A substrate heating method comprising:
- heating a top plate by a hot plate, which is arranged above a hot plate so that a vertical space is formed between the hot plate and the top plate, the top plate having an evacuated internal chamber serving as a vacuum insulating layer;
- placing a substrate, coated with a coating solution, on the hot plate;
- and
- heating the substrate to heat the coating solution, while generating a gas flow flowing through the space between the hot plate and the top plate.
The method according to claim 19 further comprising:
- supplying a cooling gas into the space below the hot plate to cool the hot plate, after the substrate having been heated is removed from the hot plate and before another substrate is placed on the hot plate.
Dependencies are inferred from the claim text.